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Hitachi High Technologies America, Inc.

Hitachi

SU6600 Analytical VP FESEM

SU6600
SU6600 Analytical VP FESEM

The SU6600 is Hitachi's latest high resolution analytical field emission SEM with Variable Pressure technology allowing observation and analysis of any type of wet, oily or dirty sample. Advanced Schottky electron gun technology combined with our patented ADAPT, automated differential aperture system, yields greater than 200nA of current; ten times the current other manufacturers can provide with thermal emissions. The large analytical chamber accommodates EDS, WDS, EBSP and CL simultaneously and at the same analytical working distance.

Electron Gun ZrO/W Schottky Electron Source
Beam Current Less than or equal to 200nA
Automated Differential Aperture technology
Resolution 1.2nm at 30kV
3.0nm at 1kV
3.0nm at 60Pa with ESED
3.0nm at 30Pa with BSED
Stage 110mm x 110mm; X and Y
Chamber Large analytical chamber