DesignGauge

As the dimensions of semiconductor devices continue to shrink, along with the introduction of immersion lithography, process control has become increasingly stringent.

RET (Resolution Enhancement Technology), intended to ease CD budgets, increases the complexity of OPC (Optical Proximity Correction) which also increases the volume of inspection points, leaving engineers to detect and cope with systematic defects.

OS Microsoft® Windows ® XP Professional Service Pack 2 （Japanese or English version） CPU Equal to or higher than Intel ® Pentium ® 4 Hard Disk Two HDD units of 400 GB or more (built-in type) * HDD units using RAID configuration is not available. Monitor 19-inch or larger LCD or CRT having a resolution of 1280 x 1024 (SXGA) . External Storage DVD-RAM Drive, FD Drive LAN Network Controller of 100BaseT or higher level