|
Ion Source
|
Gallium liquid metal ion source
|
|---|
|
Accelerating Voltage
|
10 - 40kV
|
|---|
|
Image Resolution
|
6nm or better
|
|---|
|
Magnification
|
~x 220,000 (max.)
|
|---|
|
Beam Current Density
|
30A/cm2 or greater
|
|---|
|
Scanning Area
|
1.8mm x 1.8mm (max.) for eucentric stage
|
|---|
|
Aperture
|
CPU controlled motor driven
|
|---|
|
Ultimate Vacuum
|
Ion chamber; 6 x 10-6 Pa or better
Intermediate chamber; 8 x 10-5 Pa or better
Specimen chamber; 6 x 10-4 Pa or better
|
|---|
|
Display Monitor
|
Large color CRT
|
|---|
|