 | | Metrology Systems |
Hitachi metrology systems sets the technology pace in process control instrumentation by incorporating Hitachi's proven electron optics for controlling critical dimensions in next-generation semiconductor devices. The systems provide high-resolution imaging and high throughput with easy operation. The systems are fully network compatible, accommodate 200mm or 300mm wafers and are ideal for CD metrology, process development and defect review applications.
Product List: CG4000, RS5000