The Hitachi Supercatalytic Decomposition System will decompose even the most stable PFC's. The SCDS is 100% compatible with existing and emerging tool sets and is available with single or multiple tool connections. Seamless integration means no process requalification is necessary. System performance is virtually independent of chamber processes and flows.
The Hitachi SCDS utilizes a state-of-the-art catalytic technology to achieve the highest abatement efficiencies possible for perfluorocompounds (PFCs). Chemical reactions, such as the break down of PFCs, are enhanced through the use of this catalyst. Although the catalyst is not directly involved in the reaction itself, it provides a lower energy pathway for the reaction to proceed.
In this manner the reaction proceeds at a faster rate, at a lower temperature, and more completely than is possible by Simply attempting to burn the PFCs.