Hitachi’s newest PFC abatement product line, the SCDS-3000, continues Hitachi’s tradition of providing solutions that aid SC manufacturers in being good environmental stewards. Built on the proven point-of-use (POU) catalytic technology, Hitachi adds full-fab PFC abatement capability. Achieving >99% DRE values for PFC gases is easy and no fab support space since the SCDS-3000 can be located outside the facility or on the roof. To learn more contact Hitachi at 1-877-327-3827 or at
etch.sales@hitachi-hta.com.