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starting of breadcrumb Semiconductor Equipment Division  > Products > SCDSending of breadcrumb
 

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SCDS PFC Abatement System

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SCDS PFC Abatement System

 
The SCDS Advantage
System Overview
System Performance
System Specifications
System Maintenance
SCDS-3000


 

System Maintenance

 

Hitachi designed the SCDS with ease of maintenance built in. For PFC abatement applications the system need only be cleaned and inspected annually. Catalyst replacement is also safe and easy utilizing the built-in elevator system. Simply disconnect the cooling room and lower it with the elevator. The catalyst, contained within a one-piece canister, is removed using the elevator. A new catalyst canister and the cooling room are replaced and the system is ready.

SCDS Low Cost of Operation
Pre-Packed Tower and Pre-Spray Clean Annually
Catalyst Replace 12-24 months
Cooling Room Clean Annually
Wastewater Tank Clean Annually
Packed Tower Clean Every 2-3 Years
 

Extremely low water usage

  • CD-60........0.5 gpm
  • CD-120......0.6 gpm
  • CD-200......0.9 gpm

Long lifetime catalyst.....> 18 months typical

Two year warranty

Award winning Hitachi Support

 
 
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SCDS PFC Abatement System

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