 | | SCDS PFC Abatement System |
System Specifications
The SCDS is available in 60, 120 or 200 liter per minute sizes. With its low cost of operation, 12-24 month catalyst lifetime, and 2 year warranty, the SCDS can improve the environmental soundness of your facility while maintaining a low Cost of Ownership.
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- Decomposes all PFCs at an efficiency of >99%
- Higher DRE values than combustion or plasma abatement
- DRE rates remain high for high gas flow rates
(300mm process volumes) - Multi-Chamber/Multi-Tool Abatement
- Three models (60, 120, and 200 L/min)
- Two-Year Warranty
- 24 Month typical catalyst lifetime
- Industry Leading - Lowest CoO / Cost per Chamber
- Minimal water usage with recirculation
(<1 gpm for CD-200 ) - Small footprint and location flexibility
- No flammable fuel gas requirements
- No adverse impact to process tools, dry pumps, or forelines
- No HF (< 1ppm) in treated exhaust
- No SOx or NOx emissions for standard PFC abatement
- S2-93A and CE compliant
- Spent catalyst recycled as a steel additive
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SCDS Consumable and Facilities Information
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Model
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CD-60
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CD-120
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CD-200
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PFC Treatment Capacity
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60 L/min
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120 L/min
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200 L/min
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Electrical
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4kW
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8kW
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11kW
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Water Usage
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0.4 gpm
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0.6 gpm
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0.9 gpm
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System Size
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W 39 in.
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W 45 in.
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W 45 in.
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D 22in.
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D 25in.
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D 25in.
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H 74 in.
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H 74 in.
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H 74 in.
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Reactor Temperature
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300°C - 800°C
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300°C - 800°C
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300°C - 800°C
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Catalyst Lifetime
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> 18 months
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> 18 months
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> 18 months
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Uptime
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> 99%
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> 99%
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> 99%
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Warranty
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24 months
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24 months
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24 months
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