SCDS PFC Abatement System

C₅F₈, though extremely toxic, is growing in popularity as an etchant in next generation processes. One of the only systems on the market to eliminate this useful, yet hazardous gas is the Hitachi SCDS. The above data, recorded using FTIR methods, shows 870 ppm of C₅F₈ and etch process byproducts reducing to negligible amounts after SCDS abatement.

Super Catalytic Decomposition System PFC Destruction