Back to Hitachi-HTA Home
Product Finder
Global Network
|
Home
|
Products
|
Press
|
Events
|
Service and Support
|
Contact
|
Division
---------------------------
Corporate
Semiconductor Equipment
Electron Microscope
Life Sciences
Electronic Components
Electronic Products
Production Systems
Advanced Materials
Hard Disk Manufacturing Systems
Information Systems
Search
> advanced search
Semiconductor Equipment Division
>
Products
> SCDS
SCDS PFC Abatement System
printable version
SCDS PFC Abatement System
The SCDS Advantage
System Overview
System Performance
System Specifications
System Maintenance
SCDS-3000
System Overview
Pre-Packed Tower and Pre-Spray
Water Scrubber
Particulate Matter Removed
Water Soluble (Acidic) Components Removed
Pre-Packed Tower uses Re-Circulated Wastewater
Catalytic Reactor and Cooling Room
Pre-heated mixing stage for PFCs/Air/Steam
PFC cracking catalyst (PFCs-->CO
2
+ HF
CO oxidizing catalyst (Converts CO-->CO
2
)
Cooling room cools exit gases with water spray
Cooling room uses re-circulated wastewater
Post Packed Tower
Separates CO
2
and HF Gases
Cyclone Dries CO
2
Gases
Ejector (Venturi Pump) Removes CO
2
From SCDS
HF abosorbs into wastewater in
post-packed tower
Watewater collected and Re-Circulated by
Wastewater tank
XT Chamber for 32nm Node Technology
Etch Systems
700 Series
UHF-ECR Chamber
Microwave ECR Chamber
SCDS PFC Abatement System
|
Site Map
|
Terms of Use
|
Contact
|
Careers
|
© 2002- Hitachi High Technologies America, Inc. All rights reserved.