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starting of breadcrumb Semiconductor Equipment Division  > Products > SCDSending of breadcrumb
 

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SCDS PFC Abatement System

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SCDS PFC Abatement System

 
The SCDS Advantage
System Overview
System Performance
System Specifications
System Maintenance
SCDS-3000


 

System Overview

 

Pre-Packed Tower and Pre-Spray

  • Water Scrubber
  • Particulate Matter Removed
  • Water Soluble (Acidic) Components Removed
  • Pre-Packed Tower uses Re-Circulated Wastewater

Catalytic Reactor and Cooling Room

  • Pre-heated mixing stage for PFCs/Air/Steam
  • PFC cracking catalyst (PFCs-->CO2 + HF
  • CO oxidizing catalyst (Converts CO-->CO2)
  • Cooling room cools exit gases with water spray
  • Cooling room uses re-circulated wastewater

Post Packed Tower

  • Separates CO2 and HF Gases
  • Cyclone Dries CO2 Gases
  • Ejector (Venturi Pump) Removes CO2
    From SCDS
  • HF abosorbs into wastewater in
    post-packed tower
  • Watewater collected and Re-Circulated by
  • Wastewater tank

 
 
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XT Chamber for 32nm Node Technology

Etch Systems

700 Series

UHF-ECR Chamber

Microwave ECR Chamber

SCDS PFC Abatement System

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