 | | 700 Series |
700 Series Overview
Hitachi designed the 700 Series platform to meet all Poly, Trench, Dielectric, Metal, Nitride and Low-k etch applications for 200mm and 300mm wafers. Hitachi has worked closely with international consortiums as well as its customer base to provide a quality platform that exceeds today's sub 70nm requirements for 300mm wafers.