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Secondary electron image resolution
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1.0nm/15kV; 1.6nm/1kV
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Magnification
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20x - 800,000x |
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Probe Current
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1 pA - 100 nA
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5 axis motor-drive stage
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X,Y: 0-110mm, Z: 1.5 - 40mm, T: -5/+70 deg., R: 360 deg.
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Sample Size
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150mm dia. (standard), 200mm dia. (option)
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Mountable Accessories
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EDX, WDX, EBSP, STEM, BSE, CL. cryogenic stage
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