| Resolutionin SE Imaging (HighVacuum Mode) |
3.0nm @30kV
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Resolution in BSE Imaging (Low Vacuum Mode)
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4.0nm @30kv |
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| Accelerating Voltage |
0.3 - 30kV
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| Magnification | 5x - 300,000x |
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| Specimen Stage (X,Y and Tilt) | 150mm x 110mm, -20/+90 degrees |
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| Maximum Specimen Size and Height | 300mm diameter; 110mm (WD=10mm) |
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| Other | Computer eucentric stage with 5-axes motorization with navigation software; 5-segment retractable BSED for topt, compo and 3D and TV observation; utilizes same GUI as S-3400N for toolset continuity; integrated PCI Relationship Database and advanced image processing; dual image display with signal mixing |
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