 | | IS-Series Patterned Wafer Inspection System |
Product Number: IS Series
Overview
Hitachi IS-series inspection systems for patterned wafers utilize Hitachi pioneered darkfield imaging technology, and provide high sensitivity for patterned wafer inspection at high throughputs.
Detection of Broad-Range Defects of Interest
User-configurable illumination angles and directions, combined with a newly designed oblique detector enable the Hitachi IS systems to detect the critical defects of interest (DOI’s) under optimal inspection settings.
Superior Cost Effective Inspection Solution
The IS patterned wafer inspection systems offer users multiple sensitivity selections with maximized throughputs, thus users can achieve an optimal solution for their inspection needs based on their production and engineering requirements.
Easy Recipe Setup in Minutes
With a user-friendly GUI and selectable optical design for illumination and signal detection, users are able to generate working inspection recipes in a very short period of time. The on-board UV review capability will assist the users in achieving recipe optimization quickly and easily.