Back to Hitachi-HTA Home
Product Finder
Global Network
|
Home
|
Products
|
Tech Notes
|
Press
|
Events
|
Service and Support
|
Division
---------------------------
Corporate
Semiconductor Equipment
Electron Microscope
Life Sciences
Electronic Components
Electronic Products
Production Systems
Advanced Materials
Hard Disk Manufacturing Systems
Information Systems
Search
> advanced search
Electron Microscope Division
>
Products
>
Inspection and Review Systems
> IS Wafer Inspection System
IS-Series Patterned Wafer Inspection System
printable version
IS-Series Patterned Wafer Inspection System
Overview
System Specifications
Product Number:
IS Series
System Specifications
Wafer Size
Φ300mm, Φ200mm
Sensitivity @ Extra High Sensitivity mode
32nm - Extra High Sensitivity Mode
Throughput (@ High Speed Mode)
37wph (Φ300mm) 60wph (Φ200mm)
Throughput (@ High sensitivity Mode)
25wph (Φ300mm) 45wph (Φ200mm)
Additional Features
Built-in UV Optical Review; On-board Callification Function
Electron Microscopes
Tabletop Microscopes
TM-1000 Tabletop Microscope
PCI Data Management System
Quartz PCI
Transmission Electron Microscopes
H-7650 120 kV Automatic TEM
H-9500 300kV TEM
HD-2300A UHR 200keV FE-STEM
HF-3300 300 kV FE TEM
Standard and Variable Pressure SEM
S-3700N Ultra Large VP-SEM
S-3400N Fully Automated VP SEM
Field Emission SEM
S-4300 SE/N Variable Pressure FE SEM
S-4300 Cold FE-SEM
S-4300 SE Analytical Schottky FE-SEM
S-5500 In-Lens FE SEM
S-4800 UHR FE-SEM
SU-70 UHR Schottky (Analytical) FE-SEM
Focused Ion Beam System
FB-2100 FIB System
Metrology Systems
CG4000 Scanning Electron Microscope
DesignGauge
Inspection & Review Systems
LS Unpatterned Wafer Inspection System
RS-Series Defect Review SEM
IS-Series Patterned Wafer Inspection System
|
Site Map
|
Terms of Use
|
Contact
|
Careers
|
© 2002- Hitachi High Technologies America, Inc. All rights reserved.