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starting of breadcrumb Electron Microscope Division  > Products > Inspection and Review Systems > LS Wafer Inspection Systemsending of breadcrumb
 

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LS Unpatterned Wafer Inspection System
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LS Unpatterned Wafer Inspection System

 
Overview
System Specifications


Product Number: LS-Series

 
 

System Specifications

 

Wafer Size

300mm / 200mm

Sensitivity*

32 nm – Extra High Sensitivity Mode

Throughput (Std Mode)

80wph (300mm)

 
 
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