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Electron Microscope Division
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Metrology Systems
> CG4000
CG4000 Scanning Electron Microscope
printable version
CG4000 Scanning Electron Microscope
Overview
CG4000 System Specifications
Product Number:
CG4000
CG4000 System Specifications
Wafer Size
300mm (200mm)
Resolution
1.8nm (Accelerating voltage: 800V)
Repeatability
±1% or 0.3nm (3 sigma) (With Hitachi standard wafer ）
Autoloader
2 or 3 FOUPs random access
Throughput
36 wafers / hour (20-measurement points on wafer)
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