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XT Chamber for 32nm Node Technology |
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| | XT Chamber for 32nm Node Technology |
Co-Axial Chamber Advantages
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- Magnetic system retrofit-able (Magnetron-cavity)
- Uniform reactive gas & by-product distribution
- High speed evacuation by direct pumping
- Fewer moving parts
- Reduced disassembly time for WC
- Chamber swap kit design
- Double gate valve system
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