skip header  Back to Hitachi-HTA Home
   Product Finder    Global Network Global Site

site name(Site name)go HITACHI xxxx Home


starting of primary navigation |  Home  |   Products  |   Tech Notes  |  Press  |  Events  |  Service and Support  |  ending of primary navigation

Search
Go

 > advanced search
starting of main content

starting of breadcrumb Electron Microscope Division  > Products > Electron Microscopes > Field Emission SEM > S-5500 In-Lens FE SEMending of breadcrumb
 

page title

S-5500 In-Lens FE SEM

printable version


 
 

S-5500 In-Lens FE SEM

 
Overview
Specifications
STEM Images of Lattice Fringes and Beyond


Product Number:S-5500

 
 

Overview

 
  • 0.4nm resolution at 30kV (Highest SEM resolution guarantee in the world)
  • 1.6nm resolution at 1kV
  • Enormous magnification range of 60X – 2,000,000X
  • Patented SE/BSE detector mode for signal mixing
  • Unique BF/DF Duo-STEM detector option
  • Diverse specimen holders, compatible with FIB and STEM

The Hitachi S-5500 In-lens FE-SEM is a dedicated ultra-high resolution FE-SEM for the advancement of leading edge research and development of nanotechnologies. Our patented in-lens technology provides the ultimate performance of imaging resolution and EDX analysis.

An astonishing resolution of 1.6nm at 1kV and 0.4nm at 30kV are guaranteed onsite. Building upon the mechanical stability of the S-5200, the S-5500 is equipped with a shielding system for reduced EMI and acoustic interferences. These improvements in conjunction with a completely dry vacuum system assure our high-resolution guarantee for the life of the instrument.

Extending the capabilities of the S-5500 is its EDS solid angle of 0.15 or greater and newly designed BF/DF Duo-STEM detector (patent pending). This innovative STEM system contains an adjustable dark field detector for tunable collection angles. Sometimes a single image can change the way we look at life. The new S-5500 with its advancements in information collection will lead you to those opportunities.

 
 
starting of secondary navigation
Electron Microscopes

Tabletop Microscopes

TM-1000 Tabletop Microscope

PCI Data Management System

Quartz PCI

Transmission Electron Microscopes

H-7650 120 kV Automatic TEM

H-9500 300kV TEM

HD-2300A UHR 200keV FE-STEM

HF-3300 300 kV FE TEM

Standard and Variable Pressure SEM

S-3700N Ultra Large VP-SEM

S-3400N Fully Automated VP SEM

Field Emission SEM

S-4300 SE/N Variable Pressure FE SEM

S-4300 Cold FE-SEM

S-4300 SE Analytical Schottky FE-SEM

S-5500 In-Lens FE SEM

S-4800 UHR FE-SEM

SU-70 UHR Schottky (Analytical) FE-SEM

Focused Ion Beam System

FB-2100 FIB System

Metrology Systems

CG4000 Scanning Electron Microscope

DesignGauge

Inspection & Review Systems

LS Unpatterned Wafer Inspection System

RS-Series Defect Review SEM

IS-Series Patterned Wafer Inspection System

starting of footer  | Site Map  | Terms of Use  |  Contact  |  Careers |

© 2002- Hitachi High Technologies America, Inc. All rights reserved.