| Resolution |
3.0nm High Vacuum Mode; 4.0nm Variable Pressure Mode
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Detectors
| SE and BSE (solid state, TV rate observation) |
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| Chamber |
Accommodates 10 inch specimen; Three high TOA ports for EDS, WDS, EBSP, XRF, etc.
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| Stage | Fully eucentric, 5 axis computer controlled mororized stage |
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| Electron Gun | Variable Quad Bias Circuitry with SE Accelerator Plate |
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| Automation | Full automation including "no touch" objective aperture alignment |
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| Vacuum | Turbo Molecular Pump (TMP) |
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