 | | Microwave ECR Chamber |
Advanced Gate Technology
Gate etch remains the most critical etch step in semiconductor manufacturing. Each year more of the semiconductor industry relies on Hitachi to provide etch tools that meet and exceed their stringent gate etch requirements. Designed for extendibility into the sub 70nm regime, Hitachi’s 700 Series etch system offers the critical gate CD control, CD uniformity, repeatability, and damage-free processing required by SC manufacturers producing cutting edge devices.