|
Sapphire Wafer |
|
|
| | Sapphire Wafer |
Specifications
| Standard specs of 2" Sapphire wafer (C-Plane) 2" Basic Single Sided Polish Data |
|---|
| Direction | C-Plane | (0001) ±0.3o |
|---|
| OF-Plane | (1120) ±0.3o | | Form | Diameter |
φ50.8±0.1mm
|
|---|
| Length OF-Plane | 16±0.8mm | | Thickness | .±0.025mm | | Roughness | Ra?0.3nm | | P-V?2.0nm | | Flatness | P-V?5µm |
|
| 2” Basic Double Sided Polish Data |
|---|
| Direction | C-Plane | (0001) ±0.3. |
|---|
| OF-Plane | (1120) ±0.3. | | Form | Diameter |
φ50.8±0.1mm
|
|---|
| Length OF-Plane | 16±0.8mm | | Thickness | * ±0.025mm | | Roughness | Ra?-0.3nm | | P-V?2.0nm | | Bow | *20µm | | Parallelism | *10µm |
|
|
|