The Spare Parts Operations Department takes customer satisfaction personally, and is committed to providing superior value at fair prices. Hitachi High Technologies America strives to offer the highest quality service and parts to support our varied worldwide equipment installations 24 hours a day, 365 days a year. Hitachi manages a supplier base, which offers high quality, low cost spare parts. Additionally, Hitachi offers parts programs to minimize the total Cost of Ownership (CoO) for our customers
Hitachi has implemented a Remote Warehousing program utilizing remote supply depots. These centrally located depots stock material closer to our customers in order to handle critical situations. In addition, customer service is supplied around the clock to support our customers in all aspects of their production activities. As a result, we can respond faster to a customer's crucial needs and "Machine Down" time is reduced.
Also, Hitachi has met the challenge of providing lower repair costs and decreased lead-times for critical parts by establishing a Repair Exchange Pool program. This program is available to customers interested in exchanging certain repairable parts for ones that have been refurbished and repaired to meet or exceed the manufacturer's specifications. As a result, lead-time for these parts is greatly decreased, allowing the customer to reduce their on-site inventory. Each part in the repair pool is under a 90 day parts and labor warranty.
Email us Please note that these e-mail addresses are for Semiconductor Manufacturing Equipment parts only. For information on parts for other Hitachi products, please call 1-800-HITACHI.
For Spare Parts, including price quotes and availability:
Etcher/Ion Beam Spare Parts
For Warranty, Repair, and Merchandise Return issues:
RMA Department
Regarding operations procedures, policies, and/or general inquiries:
Operations Information
Regarding spare parts purchasing:
Purchasing