A SiLKnetSM AllianceTM data network member since December 2002, Hitachi High Technologies (HHT) supports the global semiconductor industry and semiconductor research with high-density plasma etch and metrology equipment for semiconductor IC development and production. As a member of the Etch module, HHT is working as an Alliance partner to develop new state-of-the-art etch processes for porous SiLK resin designed to meet the industry's requirements for new low-k material integration schemes.